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Manifold Sistemler

0.1 CFM MINIMANIFOLD
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0.1 CFM MINIMANIFOLD

 

Using patent pending technology, Lighthouse Worldwide Solutions has created the industry’s smallest 0.1 CFM sequencing particle counting manifold system. When connected to the Lighthouse  REMOTE 2014P, 3014P or 5014P particle counter, the 0.1 CFM MiniManifold TM is the best-in-class solution for tool monitoring and qualifi cation, mini-environment monitoring and even cart-based portable monitoring systems.The 0.1 CFM MiniManifold TM allows a single particle counter to monitor up to 6 locations in a process tool or  minienvironment at 0.1 CFM. The  0.1 CFM MiniManifold TM consists of a manifold sequencing system with a built-in controller and an optional mini-blower for purge flow. The controller communicates with the particle counter and can interface to a computer system or process tool via the RS-485 MODBUS communications protocol.The optional external blower can be installed at a distance from the manifold, adding fl exibility to its installation.  Programming sequences for the 0.1 CFM MiniManifold TM are user-defined for such functions as port sequence, purge duration, sample duration and hold time.  Up to 200 data records, which include environmental data, can be stored in its built-in buffer.

 

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